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Slowing Ion Gun Product List

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Cold Cathode Deceleration Ion Gun "OMI0750 Series"

High-precision reduction-type multi-segment lenses enable the irradiation of low-speed ion beams with high current density.

This product is a decelerated cold cathode ion gun that can be used in ultra-high vacuum with beam energy ranging from 10 eV to 3000 eV. It efficiently extracts ions and, with a high-precision decelerated multi-stage lens, can irradiate a low-speed ion beam with high current density. The filament-free structure allows for the use of reactive gases and enables shorter maintenance cycles due to its long lifespan. It features a newly designed discharge chamber that excels in maintainability. Additionally, the high-efficiency differential exhaust design keeps the main chamber at ultra-high vacuum levels. 【Features】 - Decelerated cold cathode ion gun - Capable of irradiating low-speed ion beams with high current density - Filament-free structure allows for the use of reactive gases - Enables shorter maintenance cycles due to long lifespan - Newly designed discharge chamber with excellent maintainability *For more details, please refer to the PDF document or feel free to contact us.

  • Plasma surface treatment equipment
  • Slowing Ion Gun

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